Advanced Search
DSpace@MIT

Submicron Structures Technology and Research

Research and Teaching Output of the MIT Community

Submicron Structures Technology and Research

Download
Author: Anderson, Erik H.; Carter, James M.; Chu, William; Komatsu, Kazu; Quek, Hui Meng; Yen, Anthony T.; Plotnik, Irving; Schattenburg, Mark L.; Smith, Henry I.; Akhtar, Salmon; Ku, Yao C.; Toth, Markus; Porter, Mark; Antoniadis, Dimitri A.; Field, S.; Kastner, Marc A.; Licini, Jerome C.; Meirav, Udi; Park, Samuel L.; Scott-Thomas, John H. F.; Bagwell, Phillip F.; Ismail, Khalid; Orlando, Terry P.; Shahidi, Ghavam G.; Chou, Stephen Y.; Ajuria, Sergio; Atwater, Henry A.; Floro, Jerrold A.; Garrison, Stephen M.; Palmer, Joyce E.; Thompson, Carl V.; Canizares, Claude R.
Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued: 1987-01
Description:
Contains reports on sixteen research projects.
URI: http://hdl.handle.net/1721.1/57008
Other Identifiers: RLE_PR_129_01
Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987
Submicron Structures Technology and Research
Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129
Keywords: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Improved Mask Technology for X-Ray Lithography, Theoretical Analysis of the Lithography Process, Electronic Conduction in One-Dimensional Semiconductor Devices, Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm Period Grating-Gate Field-Effect Transistors, Surface Superlattice Formation in III-V Field-Effect Transistors, Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines, Electron Transport in MOSFETs in Si with Deep-Submicron Channel Lengths, Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFETs, Application of the Shubnikov-de Haas Oscillations in Characterization of GaAs MODFETs, Crystalline Films on Amorphous Substrates, Ion-Beam-Enhanced Grain Growth in Thin Films, Epitaxy via Surface-Energy-Driven Grain Growth, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings

Show full item metadata

Files in this item

Name Size Format Description
RLE_PR_129_01.pdf 978.2Kb PDF

This item appears in the following Collection(s)

MIT-Mirage