Microstructural Evolution in Thin Films of Electronic Materials
Citable URI:
http://hdl.handle.net/1721.1/57060
| Title: | Microstructural Evolution in Thin Films of Electronic Materials |
| Author: | Ajuria, Sergio; Quek, Hui Meng; Thompson, Carl V., III; Smith, Henry I.; Frost, Harold J.; Floro, Jerrold A.; Liu, Yauchin; Palmer, Joyce E.; Chong, Tow; Fonstad, Clifton G., Jr.; Im, James S.; Chen, Chenson K.; Jiran, Eva; Clevenger, Lawrence A.; DeAvillez, Roberto R.; Cammarata, Robert C.; Judas, Andreas; Olson, John; Tu, King-Ning; Gosele, Ulrich; Cho, Jaeshin; Kahn, Hal; Longworth, Hai P.; Ro, Jaesang; Dubner, Andrew D.; Melngailis, John |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1988-01-01 |
| Description: | Contains reports on eight research projects. |
| URI: | http://hdl.handle.net/1721.1/57060 |
| Other Identifiers: | RLE_PR_131_01_01s_02 |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1988 Solid State Physics, Electronics And Optics Materials and Fabrication Microstructural Evolution in Thin Films of Electronic Materials |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131 |
| Keywords: | Microstructural Evolution in Thin Films of Electronic Materials, Grain Growth in Thin Films, Modelling of Microstructural Evolution in Thin Films, Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems, Thin Film Zone Melting Recrystallization of Silicon, Capillary Instabilities in Thin Solid Films, Kinetics of Thin Film Silicide Formation, Reliability and Microstructures of Interconnects, Focused Ion Beam Induced Deposition |
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| RLE_PR_131_01_01s_02.pdf | 3.365Mb |
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