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Microstructural Evolution in Thin Films of Electronic Materials

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Microstructural Evolution in Thin Films of Electronic Materials

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Author: Thompson, Carl V.; Frost, Harold J.; Floro, Jerrold A.; Liu, Yachin; Cho, Jaeshin; Kahn, Harold; Longworth, Hai P.; Smith, Henry I.; Palmer, Joyce E.; Burns, Geoffrey F.; Fonstad, Clifton G.; Clevenger, Lawrence A.; Ma, En; DeAvillez, Roberto R.; Tu, King-Ning; Evans, Paul; Im, James S.; Chen, Chenson K.; Jiran, Eva; Ro, Jaesang; Dubner, Andrew D.; Melngailis, John; Edell, David J.
Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued: 1989-01-01
Description:
Contains reports on ten research projects.
URI: http://hdl.handle.net/1721.1/57091
Other Identifiers: RLE_PR_132_01_01s_02
Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1989
Solid State Physics, Electronics and Optics
Materials and Fabrication
Microstructural Evolution in Thin Films of Electronic Materials
Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132
Keywords: Microstructural Evolution in Thin Films of Electronic Materials, Modeling of Microstructural Evolution in Thin Films, Reliability of Interconnects, Microstructures of Interconnects, Epitaxial Grain Growth, Heteroepitaxy in Lattice Mismatched Systems, Kinetics of Thin Film Silicide Formation, Coarsening of Particles on a Planar Substrate, Thin Film Zone Melting Recrystallization of Silicon, Capillary Instabilities in Thin Solid Films, Focused Ion Beam Induced Deposition, Protective Coatings for Integrated Circuits in an In Vitro Environment

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