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Focused Ion Beam Fabrication

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dc.contributor.author Melngailis, John en_US
dc.contributor.author Murguia, James E. en_US
dc.contributor.author Shepard, Mark I. en_US
dc.contributor.author Musil, Christian R. en_US
dc.contributor.author Lezec, Henri J. en_US
dc.contributor.author Zamani, Susan en_US
dc.contributor.author Ismail, Khalid en_US
dc.contributor.author Mahoney, Leonard J. en_US
dc.contributor.author Huh, Jeung-Soo en_US
dc.contributor.author Swain, Herbert H. en_US
dc.contributor.author Blauner, Patricia G. en_US
dc.contributor.author Ro, Jaesang en_US
dc.contributor.author Butt, Yousaf en_US
dc.contributor.author Thompson, Carl V. en_US
dc.contributor.author Dubner, Andrew D. en_US
dc.contributor.author Wagner, Alfred en_US
dc.contributor.author Tao, Tao en_US
dc.contributor.author Xue, Ziling en_US
dc.contributor.author Kaesz, Herbert D. en_US
dc.date.accessioned 2010-07-16T04:12:11Z
dc.date.available 2010-07-16T04:12:11Z
dc.date.issued 1989-01-01 to 1989-12-31 en_US
dc.identifier RLE_PR_132_01_01s_03 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/57123
dc.description Contains reports on ten research projects. en_US
dc.description.sponsorship U.S. Army Research Office Contract DAAL03-88-K-0108 en_US
dc.description.sponsorship Hughes Research Laboratories Fellowship en_US
dc.description.sponsorship SEMATECH en_US
dc.description.sponsorship Charles S. Draper Laboratory Contract DL-H-261827 en_US
dc.description.sponsorship U.S. Army Research Office Contract DAAL03-87-K-0126 en_US
dc.description.sponsorship IBM General Technologies Division en_US
dc.description.sponsorship IBM Research Division en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1989 en_US
dc.relation.ispartof Solid State Physics, Electronics and Optics en_US
dc.relation.ispartof Materials and Fabrication en_US
dc.relation.ispartof Focused Ion Beam Fabrication en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Focused Ion Beam Fabrication en_US
dc.subject.other Development of Focused Ion Beam Implantation en_US
dc.subject.other Development of Focused Ion Beam Lithography en_US
dc.subject.other Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation en_US
dc.subject.other NMOS Transistors with Focused Ion Beam Implanted Channel Regions en_US
dc.subject.other GaAs MESFETs Fabricated with Focused Ion Beam Channel Implants en_US
dc.subject.other Focused Ion Beam Exposure of Resists en_US
dc.subject.other Focused Ion Beam Induced Deposition of Low Resistivity Gold Structures en_US
dc.subject.other Fundamental Properties of Ion Induced Deposition en_US
dc.subject.other In-Situ Measurement of Gas Adsorption en_US
dc.subject.other In-Situ Measurement of Ion Induced Deposition en_US
dc.subject.other Focused Ion Beam Induced Deposition of Platinum en_US
dc.title Focused Ion Beam Fabrication en_US
dc.type Technical Report en_US


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