Focused Ion Beam Fabrication

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RLE Progress Report, No. 132 (1989)
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dc.contributor.author	Melngailis, John	en_US
dc.contributor.author	Murguia, James E.	en_US
dc.contributor.author	Shepard, Mark I.	en_US
dc.contributor.author	Musil, Christian R.	en_US
dc.contributor.author	Lezec, Henri J.	en_US
dc.contributor.author	Zamani, Susan	en_US
dc.contributor.author	Ismail, Khalid	en_US
dc.contributor.author	Mahoney, Leonard J.	en_US
dc.contributor.author	Huh, Jeung-Soo	en_US
dc.contributor.author	Swain, Herbert H.	en_US
dc.contributor.author	Blauner, Patricia G.	en_US
dc.contributor.author	Ro, Jaesang	en_US
dc.contributor.author	Butt, Yousaf	en_US
dc.contributor.author	Thompson, Carl V.	en_US
dc.contributor.author	Dubner, Andrew D.	en_US
dc.contributor.author	Wagner, Alfred	en_US
dc.contributor.author	Tao, Tao	en_US
dc.contributor.author	Xue, Ziling	en_US
dc.contributor.author	Kaesz, Herbert D.	en_US
dc.date.accessioned	2010-07-16T04:12:11Z
dc.date.available	2010-07-16T04:12:11Z
dc.date.issued	1989-01-01 to 1989-12-31	en_US
dc.identifier	RLE_PR_132_01_01s_03	en_US
dc.identifier.uri	http://hdl.handle.net/1721.1/57123
dc.description	Contains reports on ten research projects.	en_US
dc.description.sponsorship	U.S. Army Research Office Contract DAAL03-88-K-0108	en_US
dc.description.sponsorship	Hughes Research Laboratories Fellowship	en_US
dc.description.sponsorship	SEMATECH	en_US
dc.description.sponsorship	Charles S. Draper Laboratory Contract DL-H-261827	en_US
dc.description.sponsorship	U.S. Army Research Office Contract DAAL03-87-K-0126	en_US
dc.description.sponsorship	IBM General Technologies Division	en_US
dc.description.sponsorship	IBM Research Division	en_US
dc.language.iso	en	en_US
dc.publisher	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)	en_US
dc.relation.ispartof	Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1989	en_US
dc.relation.ispartof	Solid State Physics, Electronics and Optics	en_US
dc.relation.ispartof	Materials and Fabrication	en_US
dc.relation.ispartof	Focused Ion Beam Fabrication	en_US
dc.relation.ispartofseries	Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132	en_US
dc.rights	Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.	en_US
dc.subject.other	Focused Ion Beam Fabrication	en_US
dc.subject.other	Development of Focused Ion Beam Implantation	en_US
dc.subject.other	Development of Focused Ion Beam Lithography	en_US
dc.subject.other	Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation	en_US
dc.subject.other	NMOS Transistors with Focused Ion Beam Implanted Channel Regions	en_US
dc.subject.other	GaAs MESFETs Fabricated with Focused Ion Beam Channel Implants	en_US
dc.subject.other	Focused Ion Beam Exposure of Resists	en_US
dc.subject.other	Focused Ion Beam Induced Deposition of Low Resistivity Gold Structures	en_US
dc.subject.other	Fundamental Properties of Ion Induced Deposition	en_US
dc.subject.other	In-Situ Measurement of Gas Adsorption	en_US
dc.subject.other	In-Situ Measurement of Ion Induced Deposition	en_US
dc.subject.other	Focused Ion Beam Induced Deposition of Platinum	en_US
dc.title	Focused Ion Beam Fabrication	en_US
dc.type	Technical Report	en_US