Focused Ion Beam Fabrication
Author:
Melngailis, John; Lezec, Henri J.; Musil, Christian R.; Mahoney, Leonard J.; Chu, Alex; Chu, Larry; Shepard, Mark I.; Antoniadis, Dimitri A.; Turner, George W.; Woodhouse, John D.; Liao, Kenneth S.; Kazior, Thomas E.; Mozzi, Robert; Murguia, James E.; Lattes, Analisa L.; Munroe, Scott C.; Huh, Jeung-Soo; Papadopoulos, Haralabos C.; Hartney, Mark A.; Shaver, David C.; Tao, Tao; Wilkinson, William; Dubner, Andrew D.; Wagner, Alfred; Thompson, Carl V.; Ro, Jaesang
Publisher:
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued:
1990-01-01
Description:
Contains reports on thirteen research projects and a list of publications.
Other Identifiers:
RLE_PR_133_01_01s_03
Is Part Of:
Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990
Solid State Physics, Electronics and Optics
Materials and Fabrication
Focused Ion Beam Fabrication
Series/Report no.:
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133
Keywords:
Focused Ion Beam Fabrication, Tunable Gunn Diode, Light Emission From Tunable Gunn Diodes, Effect of Dose Rate on Activation of Si Implanted in GaAs, Focused Ion Beam Implantation of GaAs MMICs, Focused Ion Beam Implantation of GaAs MESFETs, Doping Gradients in GaAs MESFETs, CMOS Transistors Fabricated by Focused Ion Beam Implantation, CMOS Transistors Fabricated by Focused Ion Beam Lithography, Charge Coupled Devices with Focused Ion Beam Implanted Doping Gradients in the Channel, Focused Ion Beam Lithography, Focused Ion Beam Exposure Combined With Silylation, Focused Ion Beam Induced Deposition of Platinum, Ion Induced Deposition of Gold, Results for the 2 to 10 keV Energy Range, Ion Induced Deposition of Gold, Models for the 2 to 10 keV Energy Range, Ion Induced Deposition of Gold, Results for the 50 to 100 keV Energy Range, Ion Induced Deposition of Gold, Models for the 50 to 100 keV Energy Range, Publications
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