Focused Ion Beam Microfabrication

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Focused Ion Beam Microfabrication

Author: Melngailis, John; Lezec, Henri J.; Musil, Christian R.; Mahoney, Leonard J.; Chu, Alex; Chu, Larry; Antoniadis, Dimitri A.; Vignaud, Dominique; Liao, Kenneth S.; Shimase, Akira; Chung, James E.; Etchin, Sergey; Kazior, Thomas E.; Ro, Jaesang; Thompson, Carl V.; Chiang, Tony P.; Chu, William; Smith, Henry I.; Hartney, Mark A.; Shaver, D. C.; Xu, Xin; Della Ratta, Anthony D.; Sosonkina, Jane

Citable URI: http://hdl.handle.net/1721.1/57199

Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)

Date Issued: 1991-01-01

Description:

Contains an introduction, reports on seven research projects and a list of publications.

URI: http://hdl.handle.net/1721.1/57199

Other Identifiers: RLE_PR_134_01_01s_06

Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1991
Solid State Physics, Electronics and Optics
Materials and Fabrication
Focused Ion Beam Microfabrication

Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134

Keywords: Focused Ion Beam Microfabrication, Tunable Gunn Diodes, High Frequency Performance of Tunable Gunn Diodes, Applications of Tunable Gunn Diodes, Simulation of Tunable Gunn Diodes with Doping Gradients, Simulation of MESFETs with Doping Gradients, Limited Lateral Straggle of Focused-Ion-Beam Implants, Focused Ion Beam Implantation of GaAs MMICs, Focused Ion Beam Implantation of Transistor Optimization, Ion Induced Deposition of Gold, Ion Induced Deposition of Models, Ion Induced Deposition of Microstructure, Focused Ion Beam Lithography for X-Ray Mask Making, Focused Ion Beam for the Repair of X-Ray Masks

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