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Epitaxy and Step Structures on Semiconductor Surfaces

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Epitaxy and Step Structures on Semiconductor Surfaces

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Author: Mochrie, Simon G. J.; Blum, Kenneth I.; Abernathy, Douglas L.
Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued: 1991-01-01
Description:
Contains report on one research project.
URI: http://hdl.handle.net/1721.1/57203
Other Identifiers: RLE_PR_134_01_04s_05
Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1991
Solid State Physics, Electronics and Optics
Surfaces and Interfaces
Epitaxy and Step Structures on Semiconductor Surfaces
Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134
Keywords: Epitaxy on Semiconductor Surfaces, Step Structures on Semiconductor Surfaces, Structure of the Si(113) Surface, Phase Behavior of the Si(113) Surface

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