dc.contributor.author | Smith, Henry I. | en_US |
dc.contributor.author | Aucoin, Richard J. | en_US |
dc.contributor.author | Carter, James M. | en_US |
dc.contributor.author | Chu, William | en_US |
dc.contributor.author | Fleming, Robert C., Jr. | en_US |
dc.contributor.author | Ghanbari, Reza A. | en_US |
dc.contributor.author | Gupta, Nitin | en_US |
dc.contributor.author | Hector, Scott D. | en_US |
dc.contributor.author | Li, Huiying | en_US |
dc.contributor.author | Moel, Alberto M. | en_US |
dc.contributor.author | Schattenburg, Mark L. | en_US |
dc.contributor.author | Wong, Vincent V. | en_US |
dc.contributor.author | Ferrera, Juan | en_US |
dc.contributor.author | Lim, Michael H. Y. | en_US |
dc.contributor.author | Mondol, Mark K. | en_US |
dc.contributor.author | Frankel, Robert | en_US |
dc.contributor.author | Shah, Satyen N. | en_US |
dc.contributor.author | Antoniadis, Dimitri A. | en_US |
dc.contributor.author | Chung, James E. | en_US |
dc.contributor.author | Fang, Hao | en_US |
dc.contributor.author | Hu, Hang | en_US |
dc.contributor.author | Eugster, Cristopher C. | en_US |
dc.contributor.author | Kumar, Arvind | en_US |
dc.contributor.author | Orlando, Terry P. | en_US |
dc.contributor.author | Rooks, Michael J. | en_US |
dc.contributor.author | Burkhardt, Martin | en_US |
dc.contributor.author | del Alamo, Jesús A. | en_US |
dc.contributor.author | Chou, Michael T. | en_US |
dc.contributor.author | Shayegan, M. | en_US |
dc.contributor.author | Sang-hun, Song | en_US |
dc.contributor.author | Tsui, Daniel | en_US |
dc.contributor.author | Yee, Kenneth | en_US |
dc.contributor.author | Zhao, Yang | en_US |
dc.contributor.author | Choi, Woo-Young | en_US |
dc.contributor.author | Fonstad, Clifton G., Jr. | en_US |
dc.contributor.author | Damask, Jay N. | en_US |
dc.contributor.author | Haus, Hermann A. | en_US |
dc.contributor.author | Kolodziejski, Leslie A. | en_US |
dc.contributor.author | Chu, Jack | en_US |
dc.contributor.author | Graybeal, John M. | en_US |
dc.contributor.author | Meyerson, Bernard S. | en_US |
dc.contributor.author | Rittenhouse, George E. | en_US |
dc.contributor.author | Lew, Julie C. | en_US |
dc.contributor.author | Canizares, Claude R. | en_US |
dc.contributor.author | Ismail, Khalid | en_US |
dc.contributor.author | Karam, Nasser | en_US |
dc.date.accessioned | 2010-07-16T05:16:36Z | |
dc.date.available | 2010-07-16T05:16:36Z | |
dc.date.issued | 1992-01-01 to 1992-12-31 | en_US |
dc.identifier | RLE_PR_135_01_02s_04 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/57219 | |
dc.description | Contains reports on twenty research projects and a list of publications. | en_US |
dc.description.sponsorship | Defense Advanced Research Projects Agency Contract N00019-92-K-0021 | en_US |
dc.description.sponsorship | Joint Services Electronics Program Contract DAAL03-92-C-0001 | en_US |
dc.description.sponsorship | National Science Foundation Grant ECS 90-16437 | en_US |
dc.description.sponsorship | U.S. Army Research Office Grant DAAL03-92-G-0291 | en_US |
dc.description.sponsorship | IBM Corporation | en_US |
dc.description.sponsorship | U.S. Air Force - Office of Scientific Research Grant F49620-92-J-0064 | en_US |
dc.description.sponsorship | National Science Foundation Grant DMR 87-19217 | en_US |
dc.description.sponsorship | National Science Foundation Grant DMR 90-22933 | en_US |
dc.description.sponsorship | Defense Advanced Research Projects Agency Consortium for Superconducting Electronics | en_US |
dc.description.sponsorship | National Aeronautics and Space Administration Contract NAS8-36748 | en_US |
dc.description.sponsorship | National Aeronautics and Space Administration Grant NAGW-2003 | en_US |
dc.language.iso | en | en_US |
dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1992 | en_US |
dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
dc.relation.ispartof | Quantum-Effect Devices | en_US |
dc.relation.ispartof | Submicron and Nanometer Structures Technology and Research | en_US |
dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 135 | en_US |
dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
dc.subject.other | Submicron Structures Technology | en_US |
dc.subject.other | Submicron Structures Research | en_US |
dc.subject.other | Nanometer Structures Technology | en_US |
dc.subject.other | Nanometer Structures Research | en_US |
dc.subject.other | Submicron Structures Laboratory | en_US |
dc.subject.other | X-Ray Nanolithography | en_US |
dc.subject.other | Improved Mask Technology for X-Ray Lithography | en_US |
dc.subject.other | Improved Scanning Electron Beam Lithography | en_US |
dc.subject.other | High-Precision Mask Alignment Scheme | en_US |
dc.subject.other | Achromatic Holographic Lithography | en_US |
dc.subject.other | Fabrication of T-gate Devices using X-ray Lithography | en_US |
dc.subject.other | Tenth-micron MOSFET Device Technology | en_US |
dc.subject.other | Coulomb Charging Effects in Semiconductor Nanostructures | en_US |
dc.subject.other | Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors | en_US |
dc.subject.other | Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) | en_US |
dc.subject.other | Dual Electron Waveguide Device Fabricated Using X-ray Lithography | en_US |
dc.subject.other | Far-Infrared Spectroscopy of Arrays of Quantum Dots | en_US |
dc.subject.other | Far-Infrared Spectroscopy of Arrays of Quantum Wires | en_US |
dc.subject.other | Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography | en_US |
dc.subject.other | Channel-Dropping Filters Fabricated by X-Ray Lithography | en_US |
dc.subject.other | Novel Superconducting Tunneling Structures | en_US |
dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Spectroscopy | en_US |
dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Interferometry | en_US |
dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy | en_US |
dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry | en_US |
dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy | en_US |
dc.subject.other | Submicron-Thickness X-ray Window Technology | en_US |
dc.subject.other | GaAs Epitaxy on Sawtooth-Patterned Silicon | en_US |
dc.title | Submicron and Nanometer Structures Technology and Research | en_US |
dc.type | Technical Report | en_US |