Computer-Integrated Fabrication System Structure
Citable URI:
http://hdl.handle.net/1721.1/57288
| Title: | Computer-Integrated Fabrication System Structure |
| Author: | Troxel, Donald E.; Stamatopolous, Miltiadis A.; Gershwin, Stanley B.; Love, Nicole S.; Moyne, William P.; Kao, James T.; Kwon, Jimmy Y.; Bonvik, Asbjoern M.; Carney, John C.; Fischer, Gregory T.; Lohman, Thomas J.; McIlrath, Michael B.; Boning, Duane S.; Unver, Evren R.; Antoniadis, Dimitri A.; Gabbay, Lynn D.; Jacobs, Jarvis B.; Rahman, Nadir E.; Tso, Kit Yan |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1994-01-01 |
| Description: | Contains an introduction, reports on thirteen research projects and a list of publications. |
| URI: | http://hdl.handle.net/1721.1/57288 |
| Other Identifiers: | RLE_PR_137_03_01s_02 |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1994 Systems and Signals Computer-Aided Design Computer-Integrated Fabrication System Structure |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 137 |
| Keywords: | Computer-Integrated Fabrication System Structure, CAFE Applications, Organization of Data for Factory Design, Organization of Data for Factory Control, Organization of Algorithms for Factory Design, Organization of Algorithms for Factory Control, Statistical Process Control Charts for the Computer-Aided Fabrication Environment, Interfaces of Run-by-Run Control, Implementations of Run-by-Run Control, Integration of Run-by-Run Control, Hardware Setup for a Remote Microscope, First-Order Model for Remote Fabrication, Estimating the Lead Time Distribution of Priority Lots in a Semiconductor Factory, Factory Display Software, Message Passing Tools for Software Integration, CAFE at MIT Lincoln Laboratory, Error Handling Within CAFE, Semiconductor Manufacturing Process Flow Representation, Computer-Aided Technology Design |
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| Files | Size | Format | View | |
|---|---|---|---|---|
| RLE_PR_137_03_01s_02.pdf | 1.491Mb |
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