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Photonic integration in a commercial scaled bulk-CMOS process

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dc.contributor.author Kaertner, Franz X.
dc.contributor.author Orcutt, Jason Scott
dc.contributor.author Khilo, Anatol M.
dc.contributor.author Popovic, M. A.
dc.contributor.author Holzwarth, Charles W.
dc.contributor.author Li, Hanqing
dc.contributor.author Sun, J.
dc.contributor.author Moss, Benjamin Roy
dc.contributor.author Dahlem, Marcus Vinicius Sobral
dc.contributor.author Ippen, Erich P.
dc.contributor.author Hoyt, Judy L.
dc.contributor.author Stojanovic, Vladimir Marko
dc.contributor.author Smith, Henry Ignatius
dc.contributor.author Ram, Rajeev J.
dc.date.accessioned 2010-12-02T19:38:19Z
dc.date.available 2010-12-02T19:38:19Z
dc.date.issued 2009-11
dc.date.submitted 2009-09
dc.identifier.isbn 978-1-4244-3857-0
dc.identifier.other INSPEC Accession Number: 10963482
dc.identifier.uri http://hdl.handle.net/1721.1/60061
dc.description.abstract We demonstrate the first photonic chip designed for a commercial bulk CMOS process (65 nm-node) using standard process layers combined with post-processing, enabling dense photonic integration with high-performance microprocessor electronics. en_US
dc.description.sponsorship Texas Instruments Incorporated en_US
dc.description.sponsorship United States. Defense Advanced Research Projects Agency en_US
dc.language.iso en_US
dc.publisher Institute of Electrical and Electronics Engineers en_US
dc.relation.isversionof http://dx.doi.org/10.1109/PS.2009.5307769 en_US
dc.rights Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. en_US
dc.source IEEE en_US
dc.title Photonic integration in a commercial scaled bulk-CMOS process en_US
dc.type Article en_US
dc.identifier.citation Orcutt, J.S. et al. “Photonic integration in a commercial scaled bulk-CMOS process.” Photonics in Switching, 2009. PS '09. International Conference on. 2009. 1-2. © 2009 IEEE. en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science en_US
dc.contributor.department Massachusetts Institute of Technology. Research Laboratory of Electronics en_US
dc.contributor.approver Kaertner, Franz X.
dc.contributor.mitauthor Kaertner, Franz X.
dc.contributor.mitauthor Orcutt, Jason Scott
dc.contributor.mitauthor Khilo, Anatol M.
dc.contributor.mitauthor Popovic, M. A.
dc.contributor.mitauthor Holzwarth, Charles W.
dc.contributor.mitauthor Li, Hanqing
dc.contributor.mitauthor Sun, J.
dc.contributor.mitauthor Moss, Benjamin Roy
dc.contributor.mitauthor Dahlem, Marcus Vinicius Sobral
dc.contributor.mitauthor Ippen, Erich P.
dc.contributor.mitauthor Hoyt, Judy L.
dc.contributor.mitauthor Stojanovic, Vladimir Marko
dc.contributor.mitauthor Smith, Henry Ignatius
dc.contributor.mitauthor Ram, Rajeev J.
dc.relation.journal International Conference on Photonics in Switching, 2009. PS '09 en_US
dc.identifier.mitlicense PUBLISHER_POLICY en_US
dc.eprint.version Final published version en_US
dc.type.uri http://purl.org/eprint/type/ConferencePaper en_US
dspace.orderedauthors Orcutt, J. S.; Khilo, A.; Popovic, M. A.; Holzwarth, C. W.; Li, H.; Sun, J.; Mos, B.; Dahlem, M. S.; Ippen, E. P.; Hoyt, J. L.; Stojanovic, V.; Kartner, F. X.; Smith, H. I.; Ram, R. J. en
dc.identifier.orcid https://orcid.org/0000-0002-0259-5541
dc.identifier.orcid https://orcid.org/0000-0001-8690-231X
dc.identifier.orcid https://orcid.org/0000-0002-8733-2555
dc.identifier.orcid https://orcid.org/0000-0002-6032-8636
dc.identifier.orcid https://orcid.org/0000-0003-0420-2235
dc.identifier.orcid https://orcid.org/0000-0002-8048-0678


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