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3D assembly and actuation of nanopatterned membranes using nanomagnets

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dc.contributor.advisor George Barbastathis. en_US
dc.contributor.author Nichol, Anthony John en_US
dc.contributor.other Massachusetts Institute of Technology. Dept. of Mechanical Engineering. en_US
dc.date.accessioned 2011-12-09T21:29:04Z
dc.date.available 2011-12-09T21:29:04Z
dc.date.copyright 2011 en_US
dc.date.issued 2011 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/67591
dc.description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, June 2011. en_US
dc.description Cataloged from PDF version of thesis. en_US
dc.description Includes bibliographical references (p. 166-170). en_US
dc.description.abstract A new method for aligning and actuating membranes for 3D nano-assembly based on the interactions of nanomagnets has been developed. Arrays of nanopatterned magnetic material are integrated onto thin-film membranes. It is shown theoretically and experimentally that separate arrays of nanomagnets attract and self-align when brought into close proximity. This provides a useful mechanism for 3D nanofabrication because it allows higher positional tolerances as the nanomagnets provide the fine alignment. The features on the membrane can first be patterned using traditional wafer and thin-film processes with features such as nanophotonics as well as the nanomagnets. The membranes are then folded or stacked bringing the magnets into coarse alignment. The magnets pull-in, align and bond the membrane segments to create a highly aligned structure in 3D space. A theoretical framework was developed for the magnetic and mechanical design elements of the system. A set of experiments based on folding the membrane to bring the arrays into coarse alignment was designed requiring new mechanical hinge elements at the micro-scale. Nanomagnets were shown to provide the folding actuation, as well as alignment. It was shown that the nanomagnet arrays can provide better than 30nm self-alignment over a 100 micron membrane segment. It was also shown that the nanomagnets can provide reconfigurability, in that the systems can controllably be shifted between more than one alignment position. Further steps were taken to improve the alignment, increase the membrane size, integrate other nanofeatures and improve the membrane processing. en_US
dc.description.statementofresponsibility by Anthony John Nichol. en_US
dc.format.extent 170 p. en_US
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/7582 en_US
dc.subject Mechanical Engineering. en_US
dc.title 3D assembly and actuation of nanopatterned membranes using nanomagnets en_US
dc.title.alternative Three-D assembly and actuation of nanopatterned membranes using nanomagnets en_US
dc.title.alternative Three dimensional assembly and actuation of nanopatterned membranes using nanomagnets en_US
dc.type Thesis en_US
dc.description.degree Ph.D. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Mechanical Engineering. en_US
dc.identifier.oclc 764422557 en_US


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