An unreleased mm-wave resonant body transistor

dc.contributor.author	Wang, Wentao
dc.contributor.author	Popa, Laura Cornelia
dc.contributor.author	Marathe, Radhika A.
dc.contributor.author	Weinstein, Dana
dc.date.accessioned	2012-10-03T18:59:56Z
dc.date.available	2012-10-03T18:59:56Z
dc.date.issued	2011-03
dc.date.submitted	2011-01
dc.identifier.isbn	978-1-4244-9634-1
dc.identifier.isbn	978-1-4244-9632-7
dc.identifier.issn	1084-6999
dc.identifier.uri	http://hdl.handle.net/1721.1/73576
dc.description.abstract	In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. The quality factor (Q) of 129 at 39 GHz is ~4× lower than that of its released counterpart. Methods to improve Q and reduce spurious modes are introduced. This first demonstration of unreleased resonators in a hybrid MEMS-CMOS technology can provide RF and microwave CMOS circuit designers with active high-Q devices monolithically integrated in Front-End-of-Line (FEOL) processing without the need for post-processing or special packaging.	en_US
dc.description.sponsorship	Microelectronics Advanced Research Corporation (MARCO)	en_US
dc.description.sponsorship	United States. Defense Advanced Research Projects Agency	en_US
dc.language.iso	en_US
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)	en_US
dc.relation.isversionof	http://dx.doi.org/10.1109/MEMSYS.2011.5734682	en_US
dc.rights	Creative Commons Attribution-Noncommercial-Share Alike 3.0	en_US
dc.rights.uri	http://creativecommons.org/licenses/by-nc-sa/3.0/	en_US
dc.source	MIT web domain	en_US
dc.title	An unreleased mm-wave resonant body transistor	en_US
dc.type	Article	en_US
dc.identifier.citation	Wang, Wentao et al. “An Unreleased Mm-wave Resonant Body Transistor.” IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011. 1341–1344.	en_US
dc.contributor.department	Massachusetts Institute of Technology. Dept. of Mechanical Engineering	en_US
dc.contributor.department	Massachusetts Institute of Technology. Dept. of Physics	en_US
dc.contributor.department	Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science	en_US
dc.contributor.mitauthor	Wang, Wentao
dc.contributor.mitauthor	Popa, Laura Cornelia
dc.contributor.mitauthor	Marathe, Radhika A.
dc.contributor.mitauthor	Weinstein, Dana
dc.relation.journal	Proceedings of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011	en_US
dc.identifier.mitlicense	OPEN_ACCESS_POLICY	en_US
dc.eprint.version	Author's final manuscript	en_US
dc.type.uri	http://purl.org/eprint/type/ConferencePaper	en_US
dspace.orderedauthors	Wang, Wentao; Popa, Laura C.; Marathe, Radhika; Weinstein, Dana	en