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An unreleased mm-wave resonant body transistor

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dc.contributor.author Wang, Wentao
dc.contributor.author Popa, Laura Cornelia
dc.contributor.author Marathe, Radhika A.
dc.contributor.author Weinstein, Dana
dc.date.accessioned 2012-10-03T18:59:56Z
dc.date.available 2012-10-03T18:59:56Z
dc.date.issued 2011-03
dc.date.submitted 2011-01
dc.identifier.isbn 978-1-4244-9634-1
dc.identifier.isbn 978-1-4244-9632-7
dc.identifier.issn 1084-6999
dc.identifier.uri http://hdl.handle.net/1721.1/73576
dc.description.abstract In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. The quality factor (Q) of 129 at 39 GHz is ~4× lower than that of its released counterpart. Methods to improve Q and reduce spurious modes are introduced. This first demonstration of unreleased resonators in a hybrid MEMS-CMOS technology can provide RF and microwave CMOS circuit designers with active high-Q devices monolithically integrated in Front-End-of-Line (FEOL) processing without the need for post-processing or special packaging. en_US
dc.description.sponsorship Microelectronics Advanced Research Corporation (MARCO) en_US
dc.description.sponsorship United States. Defense Advanced Research Projects Agency en_US
dc.language.iso en_US
dc.publisher Institute of Electrical and Electronics Engineers (IEEE) en_US
dc.relation.isversionof http://dx.doi.org/10.1109/MEMSYS.2011.5734682 en_US
dc.rights Creative Commons Attribution-Noncommercial-Share Alike 3.0 en_US
dc.rights.uri http://creativecommons.org/licenses/by-nc-sa/3.0/ en_US
dc.source MIT web domain en_US
dc.title An unreleased mm-wave resonant body transistor en_US
dc.type Article en_US
dc.identifier.citation Wang, Wentao et al. “An Unreleased Mm-wave Resonant Body Transistor.” IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011. 1341–1344. en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Mechanical Engineering en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Physics en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science en_US
dc.contributor.mitauthor Wang, Wentao
dc.contributor.mitauthor Popa, Laura Cornelia
dc.contributor.mitauthor Marathe, Radhika A.
dc.contributor.mitauthor Weinstein, Dana
dc.relation.journal Proceedings of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011 en_US
dc.identifier.mitlicense OPEN_ACCESS_POLICY en_US
dc.eprint.version Author's final manuscript en_US
dc.type.uri http://purl.org/eprint/type/ConferencePaper en_US
dspace.orderedauthors Wang, Wentao; Popa, Laura C.; Marathe, Radhika; Weinstein, Dana en


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