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SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology

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dc.contributor.author Marathe, Radhika A.
dc.contributor.author Wang, Wentao
dc.contributor.author Weinstein, Dana
dc.date.accessioned 2012-10-03T19:11:01Z
dc.date.available 2012-10-03T19:11:01Z
dc.date.issued 2012-03
dc.date.submitted 2012-01
dc.identifier.isbn 978-1-4673-0324-8
dc.identifier.issn 1084-6999
dc.identifier.uri http://hdl.handle.net/1721.1/73577
dc.description.abstract This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging. These unreleased bulk acoustic resonators are driven capacitively using the thin gate dielectric of the CMOS process, and actively sensed with a Field Effect Transistor (FET) incorporated into the resonant body. FET sensing using the high f[subscript T], high performance transistors in CMOS amplifies the mechanical signal before the presence of parasitics. This enables RF-MEMS resonators at orders of magnitude higher frequencies than possible with passive devices. First generation CMOS-MEMS Si resonators with Acoustic Bragg Reflectors are demonstrated at 11.1 GHz with Q~17 and a total footprint of 5μm × 3μm using IBM's 32nm SOI technology. en_US
dc.description.sponsorship United States. Defense Advanced Research Projects Agency. Leading Edge Access Program en_US
dc.description.sponsorship United States. National Security Agency. Trusted Access Program Office en_US
dc.description.sponsorship International Business Machines Corporation en_US
dc.language.iso en_US
dc.publisher Institute of Electrical and Electronics Engineers (IEEE) en_US
dc.relation.isversionof http://dx.doi.org/10.1109/MEMSYS.2012.6170289 en_US
dc.rights Creative Commons Attribution-Noncommercial-Share Alike 3.0 en_US
dc.rights.uri http://creativecommons.org/licenses/by-nc-sa/3.0/ en_US
dc.source MIT web domain en_US
dc.title SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology en_US
dc.type Article en_US
dc.identifier.citation Marathe, Radhika, Wentao Wang, and Dana Weinstein. “Si-based Unreleased Hybrid MEMS-CMOS Resonators in 32nm Technology.” IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012. 729–732. en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Mechanical Engineering en_US
dc.contributor.mitauthor Marathe, Radhika A.
dc.contributor.mitauthor Wang, Wentao
dc.contributor.mitauthor Weinstein, Dana
dc.relation.journal Proceedings of the IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012 en_US
dc.identifier.mitlicense OPEN_ACCESS_POLICY en_US
dc.eprint.version Author's final manuscript en_US
dc.type.uri http://purl.org/eprint/type/ConferencePaper en_US
dspace.orderedauthors Marathe, Radhika; Wang, Wentao; Weinstein, Dana en


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