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Piezoelectric MEMS for energy harvesting

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dc.contributor.author Kim, Sang-Gook
dc.contributor.author Priya, Shashank
dc.contributor.author Kanno, Isaku
dc.date.accessioned 2012-12-05T20:36:32Z
dc.date.available 2012-12-05T20:36:32Z
dc.date.issued 2012-11
dc.identifier.issn 0883-7694
dc.identifier.issn 1938-1425
dc.identifier.uri http://hdl.handle.net/1721.1/75255
dc.description.abstract Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, moving us closer toward battery-less autonomous sensors systems and networks. To achieve this goal, a fully assembled energy harvester the size of a US quarter dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to robustly generate about 100 μW of continuous power from ambient vibrations. In addition, the cost of the device should be sufficiently low for mass scale deployment. At the present time, most of the devices reported in the literature do not meet these requirements. This article reviews the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation. This article also describes improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed, and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also being developed to enable more robust operation of energy harvesters. en_US
dc.description.sponsorship United States. Dept. of Energy (Office of Basic Energy Sciences, #DE-FG02–07ER46480) en_US
dc.description.sponsorship United States. Dept. of Energy (Office of Basic Energy Sciences, DE-FG02–09ER46577) en_US
dc.description.sponsorship United States. Air Force Office of Scientific Research (AFOSR Young Investigator Program) en_US
dc.description.sponsorship United States. Defense Advanced Research Projects Agency (DARPA Grant HR0011–06–1-0045) en_US
dc.description.sponsorship MIT-Iberian Nanotechnology Laboratory (Program) en_US
dc.language.iso en_US
dc.publisher Cambridge University Press (Materials Research Society) en_US
dc.relation.isversionof http://dx.doi.org/10.1557/mrs.2012.275 en_US
dc.rights Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. en_US
dc.source Kim en_US
dc.title Piezoelectric MEMS for energy harvesting en_US
dc.type Article en_US
dc.identifier.citation Kim, Sang-Gook, Shashank Priya, and Isaku Kanno. “Piezoelectric MEMS for Energy Harvesting.” MRS Bulletin 37.11 (2012): 1039–1050. Web.© Materials Research Society 2012. en_US
dc.contributor.department Massachusetts Institute of Technology. Department of Mechanical Engineering en_US
dc.contributor.approver Kim, Sang Gook
dc.contributor.mitauthor Kim, Sang-Gook
dc.relation.journal MRS Bulletin en_US
dc.identifier.mitlicense PUBLISHER_POLICY en_US
dc.eprint.version Final published version en_US
dc.type.uri http://purl.org/eprint/type/JournalArticle en_US
eprint.status http://purl.org/eprint/status/PeerReviewed en_US
dspace.orderedauthors Kim, Sang-Gook; Priya, Shashank; Kanno, Isaku en


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