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Now showing items 1-10 of 1998
Variation reduction of a closed-loop precision ceramic micromachining process
(Massachusetts Institute of Technology, 1996)
This report details the investigation of the micromachining of a TiC.A1203 ceramic using a closed-loop lapping process. Currently the micromachining process laps a ceramic bar with only a priori flatness adjustment. Bar ...
DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application
(Massachusetts Institute of Technology, 1999)
Microelectromechanical systems (MEMS) often incorporate piezoelectric thin films to actuate and detect motion of mechanical structures. Aluminum nitride is advantageous for MEMS use because it can be deposited at low ...
A study of fretting fatigue in aircraft components
(Massachusetts Institute of Technology, 1998)
This thesis presents theoretical, computational, and experimental approaches to the problem of fretting fatigue in materials systems relevant to aircraft components. The basic contact mechanics for fretting fatigue in a ...
Microelectromechanical (MEMS) structures for thin film property measurement
(Massachusetts Institute of Technology, 1998)
Microelectromechanical systems (MEMS) are becoming the bases for an important industry with potential applications in numerous fields. The current study explores the use of MEMS-based, electrically-actuated structures to ...
Impact of electrochemical process on the degradation mechanisms of AlGaN/GaN HEMTs
(Massachusetts Institute of Technology, 2014)
AlGaN/GaN high electron mobility transistors (HEMTs) constitute a new generation of transistors with excellent electrical characteristics and great potential to replace silicon technology in the future, especially in high ...
Materials and device design for MEMS piezoelectric mechanical vibration energy harvesters
(Massachusetts Institute of Technology, 2012)
Piezoelectric vibration energy harvesters (PVEHs) for microelectromechanical systems (MEMS) have received considerable attention as an enabling technology for self-powered wireless sensor networks. MEMS-PVEHs are particularly ...
Self-seeded II-V semiconductor nanowire growth by metal-organic chemical vapor deposition (MOCVD)
(Massachusetts Institute of Technology, 2016)
III-V semiconductor epitaxial nanowires have gained significant attention in recent years, as they showcase an opportunity to combine III-V material properties with a non-planar morphology. To date, semiconductor devices ...
Experimental determination of cell adhesion and proliferation response to substrata thickness
(Massachusetts Institute of Technology, 2008)
Controlling cell behavior has been a primary goal for scientists, and physical interactions, specifically cell-surface interactions, have the potential to be a robust system for cell control. Much research has been conducted ...
Microstructural study of two-phase marbles in simple shear
(Massachusetts Institute of Technology, 2009)
Microstructural and textural observations have been conducted on synthetic calcite with 20 wt% quartz deformed in simple shear using transmission electron microscopy and selected-area diffraction. The marbles were deformed ...
First-principles modeling of thermal stability and morphology control of cathode materials in Li-ion batteries
(Massachusetts Institute of Technology, 2010)
We compute the energy of a large number of oxidation reactions of 3d transition metal oxides using the generalized gradient approximation (GGA) to density functional theory and GGA+ U method. Two substantial contributions ...