Fabricating silicon germanium waveguides by low pressure chemical vapor deposition
Citable URI:
http://hdl.handle.net/1721.1/8427
| Title: | Fabricating silicon germanium waveguides by low pressure chemical vapor deposition |
| Author: | Berlin, Dean Edward, 1978- |
| Other Contributors: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
| Advisor: | Eugene A. Fitzgerald. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 2002 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. Includes bibliographical references (p. 110-112). |
| URI: | http://hdl.handle.net/1721.1/8427 |
| Keywords: | Materials Science and Engineering. |
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