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Assessing the viability of various metallic microfabrication techniques

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Title: Assessing the viability of various metallic microfabrication techniques
Author: Hastings, Abel Z., 1973-
Other Contributors: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor: Merton C. Flemings.
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Publisher: Massachusetts Institute of Technology
Issue Date: 2002
Description: Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.Includes bibliographical references (p. 85-89).
URI: http://hdl.handle.net/1721.1/8460
Keywords: Materials Science and Engineering.

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