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Simulation tools for microelectromechanical systems

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Title: Simulation tools for microelectromechanical systems
Author: Ramaswamy, Deepak, 1974-
Other Contributors: Massachusetts Institute of Technology. Dept. of Civil and Environmental Engineering.
Advisor: Jacob White and Keven Amaratunga.
Department: Massachusetts Institute of Technology. Dept. of Civil and Environmental Engineering.
Publisher: Massachusetts Institute of Technology
Issue Date: 2001
Description: Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.Includes bibliographical references (p. 101-104).
URI: http://hdl.handle.net/1721.1/8625
Keywords: Civil and Environmental Engineering.

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