Investigation of mechanisms and influencing processing factors on mobility enhancement in strained Si n-MOSFETs
Author(s)
Xia, Guangrui, 1976-
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Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Judy L. Hoyt.
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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003. Includes bibliographical references (p. 92-95).
Date issued
2003Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.