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Alternative passivation for silicon (100), environmentally benign manufacturing, and cooperative strategy in semiconductor industry

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Alternative passivation for silicon (100), environmentally benign manufacturing, and cooperative strategy in semiconductor industry

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Author: Chan, Julia Kam Chu, 1972-
Other Contributors: Massachusetts Institute of Technology. Technology and Policy Program.
Advisor: Lionel C. Kimerling and Robert Rose.
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.; Massachusetts Institute of Technology. Technology and Policy Program.
Publisher: Massachusetts Institute of Technology
Date Issued: 2000
Description:
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering; and, (S.M.)--Massachusetts Institute of Technology, Technology and Policy Program, 2000.Includes bibliographical references (p. 118-120).
URI: http://hdl.handle.net/1721.1/8850
Keywords: Materials Science and Engineering., Technology and Policy Program.

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