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Calibration of a microvision system for MEMS device characterization

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Calibration of a microvision system for MEMS device characterization

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Alternative Title: Calibration of a microvision system for microelectromechanical system device characterization
Author: Bardhan, Jaydeep Porter, 1978-
Other Contributors: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor: Stephen D. Senturia.
Department: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Publisher: Massachusetts Institute of Technology
Date Issued: 2001
Description:
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.Includes bibliographical references (leaves 56-57).
URI: http://hdl.handle.net/1721.1/8934
Keywords: Electrical Engineering and Computer Science.

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