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Macro-scale investigation of high speed gas bearings for MEMS devices

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Macro-scale investigation of high speed gas bearings for MEMS devices

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Alternative Title: Macro-scale investigation of high speed gas bearings for micro-electro-mechanical systems devices
Author: Orr, Doyle Jay, 1969-
Other Contributors: Massachusetts Institute of Technology. Dept. of Aeronautics and Astronautics.
Advisor: Kenneth S. Breuer.
Department: Massachusetts Institute of Technology. Dept. of Aeronautics and Astronautics.
Publisher: Massachusetts Institute of Technology
Date Issued: 2000
Description:
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.Includes bibliographical references (p. 309-315).
URI: http://hdl.handle.net/1721.1/9268
Keywords: Aeronautics and Astronautics.

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