Analysis, design, fabrication, and testing of a MEMS switch for power applications
Alternative Title:
Analysis, design, fabrication, and testing of a micro-electro-mechanical systems switch for power applications
Author:
Wong, Jo-Ey, 1968-
Description:
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.Includes bibliographical references (p. 215-218).