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Creep characterization of single crystal silicon in support of the MIT Micro-Engine Project

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Creep characterization of single crystal silicon in support of the MIT Micro-Engine Project

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Author: Walters, Douglas S. (Douglas Scott), 1972-
Department: Massachusetts Institute of Technology. Dept. of Mechanical Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1999
Description:
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1999.Includes bibliographical references (leaves 135-136).
URI: http://hdl.handle.net/1721.1/9441
Keywords: Mechanical Engineering

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