Analysis and reduction of variability in scanning electron microscopy measurements of critical dimensions
Citable URI:
http://hdl.handle.net/1721.1/9579
| Title: | Analysis and reduction of variability in scanning electron microscopy measurements of critical dimensions |
| Author: | Cortesi, Elisabetta, 1966- |
| Advisor: | Lionel C. Kimerling and Lawrence M. Wein. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering; Sloan School of Management |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1998 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998. Includes bibliographical references (p. 79). |
| URI: | http://hdl.handle.net/1721.1/9579 |
| Keywords: | Materials Science and Engineering, Sloan School of Management |
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