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Reaction and transport processes in OMCVD : selective and group III-nitride growth

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Reaction and transport processes in OMCVD : selective and group III-nitride growth

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Alternative Title: Reaction and transport processes in organometallic chemical vapor deposition
Author: Mihopoulos, Theodoros, 1969-
Department: Massachusetts Institute of Technology. Dept. of Chemical Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1999
Description:
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.Includes bibliographical references.
URI: http://hdl.handle.net/1721.1/9655
Keywords: Chemical Engineering

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