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Novel etch-stop materials for silicon micromachining

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Novel etch-stop materials for silicon micromachining

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Author: Wu, Kenneth Chu-Chao
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1997
Description:
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.Includes bibliographical references (p. 62-64).
URI: http://hdl.handle.net/1721.1/9868
Keywords: Materials Science and Engineering

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