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Macro-modeling of micro-electrical-mechanical system devices

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dc.contributor.advisor Jacob White. en_US Wang, Qiutao. en_US 2005-08-19T16:52:12Z 2005-08-19T16:52:12Z 1998 en_US 1998 en_US
dc.description Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. en_US
dc.description Includes bibliographical references (leaves 48-50). en_US
dc.description.statementofresponsibility by Qiutao Wang. en_US
dc.format.extent 50 leaves en_US
dc.format.extent 2847238 bytes
dc.format.extent 2846996 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.subject Mechanical Engineering en_US
dc.title Macro-modeling of micro-electrical-mechanical system devices en_US
dc.type Thesis en_US S.M. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Mechanical Engineering en_US
dc.identifier.oclc 41995645 en_US

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