6.152J / 3.155J Microelectronics Processing Technology, Fall 2003
A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the
National Science Foundation Image Library.)
Highlights of this Course
This course site features detailed
lecture slides, along with other materials used by students in the course.
Course Description
This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.