Design rules for self-assembled block copolymer patterns using tiled templates
Name
Jae-Byum Chang.pdf
Description
Article and Supp Mat
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20.91 MB
Format
Adobe PDF
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Author(s)
Chang, Jae-Byum
Choi, Hong Kyoon
Hannon, Adam F.
Alexander-Katz, Alfredo
Ross, Caroline A.
Berggren, Karl K
Alexander-Katz, Alfredo
Date Issued
February 2014
Journal
Nature Communications
Publisher
Nature Publishing Group
Citation
Chang, Jae-Byum, Hong Kyoon Choi, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross, and Karl K. Berggren. “Design Rules for Self-Assembled Block Copolymer Patterns Using Tiled Templates.” Nature Communications 5 (February 17, 2014).
Version
Author's final manuscript
Abstract
Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block copolymer patterns resulting from all tile arrangements are determined. By combining tiles in different ways, it is possible to predict a relatively simple template that will direct the formation of non-trivial block copolymer patterns, providing a new template design method for a complex block copolymer pattern.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Program in Media Arts and Sciences (Massachusetts Institute of Technology)
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1038/ncomms4305
