Focused ion beam induced deposition of copper
Name
29550831-MIT.pdf
Description
Full printable version
Size
5.64 MB
Format
Adobe PDF
Checksum (MD5)
661195bb27534fefc4ac7fc305fe09f2
Author(s)
Della Ratta, Anthony D. (Anthony David)
Advisor(s)
John Melngailis and Carl V. Thompson.
Date Issued
1993
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993.
Includes bibliographical references (leaves 94-97).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
