Device independent process control of dielectric chemical mechanical polishing
Name
45156695-MIT.pdf
Description
Full printable version
Size
12.72 MB
Format
Adobe PDF
Checksum (MD5)
17ebcc2574ba57c2af85e2e192e42ded
Author(s)
Smith, Taber H. (Taber Hardesty)
Advisor(s)
Duane S. Boning.
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2000.
Includes bibliographical references (p. 157-162).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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