A comparative study of stress, resistivity and microstructure in copper and copper-alloy thin films
Name
27659010-MIT.pdf
Description
Full printable version
Size
4.75 MB
Format
Adobe PDF
Checksum (MD5)
38949cdbd00569d3cc740bfe8d880bee
Author(s)
Gupta, Julie
Advisor(s)
Carl V. Thompson.
Date Issued
1992
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1992.
Includes bibliographical references (leaves 84-85)
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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