Fabrication of extremely smooth nanostructures using anisotropic etching
Name
37658985-MIT.pdf
Description
Full printable version
Size
6.29 MB
Format
Adobe PDF
Checksum (MD5)
467c2b7e40ae44d903ed8c68e515d21f
Author(s)
Franke, Andrea Elke
Advisor(s)
Henry I. Smith.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references.
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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