Combined experimental and modelling studies of laser assisted chemical vapor deposition of copper and aluminum
Name
29959468-MIT.pdf
Description
Full printable version
Size
12.74 MB
Format
Adobe PDF
Checksum (MD5)
cbbdebbdf44fa93b6a7c442aee0c5151
Author(s)
Han, Jaesung
Advisor(s)
Klavs F. Jensen.
Date Issued
1993
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.
Includes bibliographical references (leaves 192-203).
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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