3D integrated photonics platform with deterministic geometry control
Name
A 3-D integrated photonics platform with deterministic geometry control.pdf
Description
Accepted version
Size
1.01 MB
Format
Adobe PDF
Checksum (MD5)
3494a7cb99bf463970fae16ae5513c74
Author(s)
Michon, Jerome
Geiger, Sarah J.
Li, Lan
Goncalves, Claudia
Lin, Hongtao
Richardson, Kathleen
Jia, Xinqiao
Hu, Juejun
Date Issued
January 2020
Journal
Photonics Research
Publisher
Optical Society of America (OSA)
Citation
Michon, Jérôme et al. "3D integrated photonics platform with deterministic geometry control." Photonics Research 8, 2 (January 2020): 194-201 © 2020 Chinese Laser Press
Version
Author's final manuscript
Abstract
3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrication methods. In this work, we pioneer a method that allows for placement of integrated photonic device arrays at arbitrary predefined locations in 3D using a fabrication process that capitalizes on the buckling of a 2D pattern. We present theoretical and experimental validation of the deterministic buckling process, thus demonstrating implementation of the technique to realize what we believe to be the first fully packaged 3D integrated photonics platform. Application of the platform for mechanical strain sensing is further demonstrated.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1364/prj.375584
