High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
Name
Kim-2010-High-throughput three.pdf
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3.56 MB
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Author(s)
Kim, Daekeun
So, Peter T. C.
Date Issued
February 2010
Journal
Proceedings of SPIE--the International Society for Optical Engineering; v.7569
Publisher
Society of Photo-optical Instrumentation Engineers
Citation
Kim, Daekeun, and Peter T. C. So. “High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications.” Multiphoton Microscopy in the Biomedical Sciences X. Ed. Ammasi Periasamy, Peter T. C. So, & Karsten Konig. San Francisco, California, USA: SPIE, 2010. 75691V-5. ©2010 SPIE--The International Society for Optical Engineering.
Version
Final published version
Abstract
Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds.
MIT Department
Massachusetts Institute of Technology. Department of Biological Engineering
Massachusetts Institute of Technology. Department of Mechanical Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
http://dx.doi.org/10.1117/12.843160
