Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
Name
Li-2011-Feasibility study on bonding quality inspection.pdf
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937.2 KB
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Author(s)
Li, Shiguang
Xu, Zhiguang
Yoon, Soon Fatt
Fang, Zhong Ping
Date Issued
June 2011
Journal
Journal of Biomedical Optics
Publisher
Society of Photo-optical Instrumentation Engineers
Citation
Shiguang Li, Zhiguang Xu, Soon Fatt Yoon and Zhong Ping Fang, "Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography", J. Biomed. Opt. 16, 066011 (Jun 02, 2011)© 2011 Society of Photo-Optical Instrumentation Engineers.
Version
Final published version
Abstract
This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber–based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.
MIT Department
Singapore-MIT Alliance in Research and Technology (SMART)
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1117/1.3590747
