Closed‐loop electron‐beam‐induced spectroscopy and nanofabrication around individual quantum emitters
Name
Nanophotonics - 2024 - Almutlaq - Closed‐loop electron‐beam‐induced spectroscopy and nanofabrication around individual.pdf
Description
Published version
Size
1.73 MB
Format
Adobe PDF
Checksum (MD5)
e1bea3e2737ffdf40a414c2e159cff2f
Author(s)
Almutlaq, Jawaher
Kelley, Kyle P
Choi, Hyeongrak
Li, Linsen
Lawrie, Benjamin
Dyck, Ondrej
Englund, Dirk
Jesse, Stephen
Date Issued
March 22, 2024
Journal
Nanophotonics
Publisher
Wiley
Citation
Almutlaq, J., Kelley, K.P., Choi, H., Li, L., Lawrie, B., Dyck, O., Englund, D. and Jesse, S. (2024), Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters. Nanophotonics, 13: 2251-2258.
Version
Final published version
Abstract
Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron–emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter–cavity interactions in integrated quantum photonics.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
MIT-Harvard Center for Ultracold Atoms
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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Creative Commons Attribution
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1515/nanoph-2023-0877
