Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Name
62221878-MIT.pdf
Description
Full printable version
Size
8.91 MB
Format
Adobe PDF
Checksum (MD5)
9c46587a09dcd3050de8687cd376b864
Author(s)
Arora, William Jay
Advisor(s)
George Barbastathis and Henry I. Smith.
Alternative Title
Folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Date Issued
2005
Publisher
Massachusetts Institute of Technology
Abstract
This thesis addresses the construction of complex three-dimensional (3-D) nanostructures using only 2-D, planar nano-fabrication techniques. In the state of the art, multiple 2-D layers are fabricated in series, each directly on top of the previous. The method advocated here is Nanostructured Origami, in which multiple adjacent 2-D layers are fabricated in parallel and are then folded into the desired 3-D configuration using the appropriate folding sequence. This thesis focuses on folding actuation for this method using the residual tensile stress in vacuum-evaporated chromium to fold silicon nitride membranes. Our results conclusively demonstrate the ability to pattern these membranes with nano-scale features and then controllably fold them into a predetermined 3-D configuration. Future work will refine the fabrication procedure for large-scale manufacturing and address alignment and latching of the folded membranes.
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.
Includes bibliographical references (p. 81-84).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
