Advanced Heterogeneous Integration Enabled by 3D Freestanding Membranes—From Material Growths to Applications
Author(s)
Kim, Jeehwan
Date Issued
November 27, 2022
Publisher
US DOE
Citation
Kim, Jeehwan. Advanced Heterogeneous Integration Enabled by 3D Freestanding Membranes—From Material Growths to Applications. United States: N. p., 2022.
Version
Author's final manuscript
Description
Conference: Materials Research Society, Boston, Nov 2022
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.2172/1923272
