Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry
Name
Cheung-2010-Chip-scale quadrupole mass filters for portable mass spectrometry.pdf
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1.39 MB
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Adobe PDF
Checksum (MD5)
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Author(s)
Cheung, Kerry
Velasquez-Heller, Luis Fernand
Akinwande, Akintunde Ibitayo
Date Issued
June 2010
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Cheung, Kerry, Luis Fernando Velasquez-Garcia, and Akintunde Ibitayo Akinwande. “Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry.” Journal of Microelectromechanical Systems 19.3 (2010): 469–483. Web. 4 Apr. 2012. © 2010 Institute of Electrical and Electronics Engineers
Version
Final published version
Abstract
We report the design, fabrication, and characterization of a new class of chip-scale quadrupole mass filter (QMF). The devices are completely batch fabricated using a wafer-scale process that integrates the quadrupole electrodes, ion optics, and housing into a single monolithic block. This process eliminates the electrode-to-housing misalignments inherent in other QMFs and enables the implementation of complex device architectures. To achieve the reported integration, 1 mm × 1 mm square electrodes of heavily doped silicon were utilized, resulting in quadrupoles with an effective aperture radius of 0.707 mm and a length of 30 mm. Mass filtering was demonstrated with this unconventional device showing a mass range of 650 amu and a resolution of ~30 at a drive frequency of 1.8 MHz. When operated in the second stability region at 2.0 MHz and a mass range of 50 amu, a peak width of 0.3 amu was achieved at mass 28, showing a resolution of ~90. This paper introduces operation in the second stability region as a reliable method for turning QMFs with less than ideal electrode geometries into high-performance devices.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/JMEMS.2010.2046396
