Integrating optics and micro-fluidic channels using femtosecond laser irradiation
Name
Anderson-2009-Integrating optics and micro-fluidic channels using femtosecond laser irradiation.pdf
Size
615.94 KB
Format
Adobe PDF
Checksum (MD5)
bc591a0bddc3be1834a77c5cf86c562a
Author(s)
Agarwal, Anuradha Murthy
Hu, J.
Richardson, M.
Richardson, K.
Petit, L.
Carlie, Nathan
Faris, C.
Choi, J.
Ramme, M.
Anderson, T.
Date Issued
February 2009
Journal
Proceedings of SPIE
Publisher
The International Society for Optical Engineering
Citation
Anderson, T. et al. “Integrating optics and micro-fluidic channels using femtosecond laser irradiation.” Commercial and Biomedical Applications of Ultrafast Lasers IX. Ed. Joseph Neev et al. San Jose, CA, USA: SPIE, 2009. 72030I-9. © 2009 SPIE--The International Society for Optical Engineering
Version
Final published version
Abstract
The ability to integrate micro-channels for fluid transport with optical elements is attractive for the development of compact and portable chip-based sensors. Femtosecond Laser Direct Writing (FLDW) in transparent materials is a powerful tool for the fabrication of such integrated devices. We demonstrate the use of FLDW to fabricate coupled micro-fluidic channels and optical waveguides towards an integrated sensing device for molecular detection. Waveguides were directly written into the host material and channels were formed by modifying the molecular structure through FLDW followed by wet chemical etching. Multiple host materials including chalcogenide glasses for IR detection are discussed.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Microphotonics Center
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
http://dx.doi.org/10.1117/12.815306
