Rectangular photonic crystal nanobeam cavities in bulk diamond
Name
mouradian2017appliedphysicalletters.pdf
Description
Published version
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1.25 MB
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Author(s) • • •
Mouradian, Sara L
Wan, Noel Heng Loon
Shroder, Tim
Englund, Dirk R.
Date Issued
July 2017
Journal
Applied Physics Letters
Publisher
AIP Publishing
Citation
Mouradian, Sara et al. "Rectangular photonic crystal nanobeam cavities in bulk diamond." Applied Physics Letters 111, 2 (July 2017): 021103 © 2017 Author(s)
Version
Final published version
Abstract
We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality (Q) factor of over 1 × 106. Measured cavity resonances show fundamental modes with spectrometer-limited Q factors ≥14×103 within 1 nm of the nitrogen vacancy centers zero phonon line at 637 nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Research Laboratory of Electronics
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1063/1.4992118