Reducing adhesion energy of nano-electro-mechanical relay contacts by self-assembled Perfluoro (2,3-Dimethylbutan-2-ol) coating
Name
1.5095760.pdf
Description
Published version
Size
1.75 MB
Format
Adobe PDF
Checksum (MD5)
8fc3d41db01c74958cc1a000ba4d78d8
Author(s)
Fathipour, Sara
Almeida, Sergio Fabian
Ye, Zhixin Alice
Saha, Bivas
Niroui, Farnaz
King Liu, Tsu-Jae
Wu, Junqiao
Date Issued
2019
Journal
AIP Advances
Publisher
AIP Publishing
Version
Final published version
Abstract
© 2019 Author(s). To enable energy-efficient electronic devices for the future, nano-electro-mechanical (NEM) relays are promising due to their high ON/OFF current ratio and potential for low operating voltage. To minimize hysteresis and, consequently, relay operating voltage, it is imperative to reduce the relay contact adhesion, which can be achieved by coating the contacts with anti-stiction self-assembled monolayers. Herein we report a 71% reduction in hysteresis voltage by utilizing a branched perfluorocarbon antistiction molecule: Perfluoro (2,3-Dimethylbutan-2-ol) (PDB) on top of the tungsten contact surfaces. Experimental results show the operation of a PDB-coated NEM relay with abrupt switching, undetectably low OFF-state current, hysteresis voltage as low as 20 mV, and a large ON/OFF current ratio (>107).
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution 4.0 International license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1063/1.5095760
