Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM
Name
2008.01917.pdf
Description
Submitted version
Size
3.43 MB
Format
Adobe PDF
Checksum (MD5)
80924b1b8d0965815f3a85bfa52aef94
Author(s)
Agarwal, Akshay
Simonaitis, John
Berggren, Karl K
Date Issued
2021
Journal
Ultramicroscopy
Publisher
Elsevier BV
Citation
Agarwal, Akshay, Simonaitis, John and Berggren, Karl K. 2021. "Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM." Ultramicroscopy, 224.
Version
Original manuscript
Abstract
Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs) that are detected by the SE detector. However, common techniques for measuring DQE approximate the SE emission process to be Poisson distributed, which can lead to incorrect DQE values. In this paper, we introduce a technique for measuring DQE in which we directly count the mean number of secondary electrons detected from a sample using image histograms. This technique does not assume Poisson distribution of SEs and makes it possible to accurately measure DQE for a wider range of imaging conditions. As a demonstration of our technique, we map the variation of DQE as a function of working distance in the microscope.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licens
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1016/J.ULTRAMIC.2021.113238
