Casimir forces on a silicon micromechanical chip
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Johnson_Casimir forces.pdf
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Author(s) • • • • • • • • •
Zou, J.
Marcet, Z.
Kravchenko, I. I.
Lu, T.
Bao, Y.
Chan, H. B.
Rodriguez, Alejandro
Reid, McMahon Thomas Homer
McCauley, Alexander Patrick
Johnson, Steven G
Date Issued
May 2013
Journal
Nature Communications
Publisher
Nature Publishing Group
Citation
Zou, J. et al. “Casimir Forces on a Silicon Micromechanical Chip.” Nature Communications 4 (2013): 1845.
Version
Author's final manuscript
Abstract
Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes.
MIT Department
Massachusetts Institute of Technology. Department of Mathematics
Massachusetts Institute of Technology. Department of Physics
Massachusetts Institute of Technology. Research Laboratory of Electronics
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DOI of Published Version
https://doi.org/10.1038/ncomms2842