Particle characterization for an eight inch wafer tungsten chemical vapor deposition system
Name
30950827-MIT.pdf
Description
Full printable version
Size
3.21 MB
Format
Adobe PDF
Checksum (MD5)
8db7f4a5bd7e96b707d6eb1d37b517c9
Author(s)
Morrison, Troy
Advisor(s)
Lionel C. Kimerling.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
Includes bibliographical references (p. 95-97).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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