Air-clad silicon pedestal structures for broadband mid-infrared microphotonics
Name
Kimerling_Air-clad silicon.pdf
Size
335.94 KB
Format
Adobe PDF
Checksum (MD5)
20af24317cb3bbe500defd0e092c4001
Author(s)
Lin, Pao Tai
Singh, Vivek
Cai, Yan
Kimerling, Lionel C.
Agarwal, Anuradha Murthy
Date Issued
March 2013
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Lin, Pao Tai et al. “Air-clad Silicon Pedestal Structures for Broadband Mid-infrared Microphotonics.” Optics Letters 38.7 (2013): 1031. © 2013 Optical Society of America
Version
Final published version
Abstract
Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ = 2.5 μm and λ = 3.7 μm, and an optical loss of 2.7 dB/cm is obtained at λ = 3.7 μm. Our pedestal silicon structures show 50∶50 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.
MIT Department
MIT Materials Research Laboratory
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1364/OL.38.001031
