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  4. RLE Progress Report, No. 135 (1992)
  5. Focused Ion Beam Microfabrication

Focused Ion Beam Microfabrication

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Author(s)
Melngailis, John
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Musil, Christian R.
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Lezec, Henri J.
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Etchin, Sergey
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Mahoney, Leonard J.
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Chu, Alex
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Antoniadis, Dimitri A.
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Haynes, Tony E.
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Vignaud, Dominique
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Kazior, Thomas E.
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Date Issued
1992-01-01 to 1992-12-31
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 135
Description
Contains an introduction, reports on x research projects and a list of publications.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
Persistent DSpace Link
http://hdl.handle.net/1721.1/57228
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